推动纳米制造技术创新

EBPG

Our cutting-edge electron beam lithography systems provide solutions for diverse application challenges, ensuring optimal throughput, full automation, ultimate stability, highest precision, and versatility for advanced nanotechnology.

 

 

 

 

 

电子束光刻系统详情

LBL

Our maskless laser beam lithography systems offer the highest resolution in the market. They combine the best performance in resolution and grayscale capabilities with user-friendliness in a portfolio of products that can address any need.

 

 

 

 

 

激光直写光刻系统详情

FIB-SEM

VELION represents a groundbreaking FIB-SEM concept tailored for nanoscale science and engineering applications. FIB nanofabrication excels in creating intricate three-dimensional and high-resolution nanostructures like plasmonic devices, nano-fluidics, localized ion implantation and sample functionalization.

Rising to the challenge of meeting the rigorous demands of nanofabrication with its FIB on a true lithography platform, configurable multi-species FIB technology, cutting-edge FIB performance, and ion microscopy capabilities for generating the highest resolution 3D images.

聚焦离子束扫描电子显微镜详情

SIMS - IONMASTER

IONMASTER is a novel ion microscope with a dedicated magnetic sector Secondary Ion Mass Spectrometer (SIMS). It is the perfect tool for the highest resolution SIMS imaging, offering unparalleled sensitivity in detecting even the smallest features. Experience a revolution in nanotechnology, opening new frontiers for a wide range of applications.

SIMS详情

Imaging and Analysis

Our portfolio of imaging and nanoanalysis tools provides the necessary precision and accuracy for large-area 3D imaging, extensive process control, and comprehensive material analysis.

成像与分析详情